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American Mineralogist; September 2001; v. 86; no. 9; p. 1094-1099
© 2001 Mineralogical Society of America
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Focused ion beam milling: A method of site-specific sample extraction for microanalysis of Earth and planetary materials

Peter J. Heaney1,*, Edward P. Vicenzi2, Lucille A. Giannuzzi3 and Kenneth J.T. Livi4

1 Department of Geosciences, 309 Deike, Penn State University, University Park, Pennsylvania 16802, U.S.A.
2 Department of Mineral Sciences, National Museum of Natural History, Smithsonian Institution,Washington, D.C. 20560-0119, U.S.A.
3 Department of Mechanical, Materials and Aerospace Engineering, University of Central Florida, Orlando, Forida 32816, U.S.A.
4 Department of Earth and Planetary Sciences, The Johns Hopkins University, Baltimore, Maryland 21218, U.S.A.

Correspondence: * E-mail: heaney{at}geosc.psu.edu

Argon ion milling is the conventional means by which mineral sections are thinned to electron transparency for transmission electron microscope (TEM) analysis, but this technique exhibits significant shortcomings. In particular, selective thinning and imaging of submicrometer inclusions during sample milling are highly problematic. We have achieved successful results using the focused ion beam (FIB) lift-out technique, which utilizes a 30 kV Ga+ ion beam to extract electron transparent specimens with nanometer scale precision. Using this procedure, we have prepared a number of Earth materials representing a range of structures and compositions for TEM analysis. We believe that FIB milling will create major new opportunities in the field of Earth and planetary materials microanalysis, particularly with respect to ultraprecious mineral and rock samples.




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